- e-beam litho circuit
- ИС, изготовленная методом электронно-лучевой литографии
English-Russian dictionary of microelectronics. 2014.
e-beam litho circuit
Смотреть что такое "e-beam litho circuit" в других словарях:
Computational lithography — (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the resolution attainable through photolithography. Computational lithography has come to the forefront of photolithography in 2008 as … Wikipedia
Nanoimprint lithography — is a method of fabricating nanometer scale patterns. It is a simple nanolithography process with low cost, high throughput and high resolution. It creates patterns by mechanical deformation of imprint resist and subsequent processes. The imprint… … Wikipedia
